Wafer Robots

The advantage of wafer robots is on vertical integration of both hardware and software, also using high precision and stiffness DD motor, the repeatability can reach±0.02mm. Wafer robots have a small circling radial and high utilization of space.

Applications include: pick and place equipment in semiconductor industry (pick and place of wafer), optoelectronics (mini panel, mini solar panel) and LED industry (sapphire substrate, rubber ring).

Various options for end effectors such as vacuum type, gripping type and flipping type.